Supporting unit, and moving table device and linear-motion guiding device that use the supporting unit
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United States of America Patent
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Dec 1, 2009
Grant Date -
Nov 9, 2006
app pub date -
Jun 25, 2004
filing date -
Jun 27, 2003
priority date (Note) -
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status (Latency Note)
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Abstract
A supporting unit in a moving table device, easily connected to a base and a table, is provided. A supporting unit (U.alpha.) has a pair of planar bearing plates. Inside the planar bearing plates are positioned spherical bearing plates, respectively. Further, a spherical axial member is sandwiched between the spherical bearing plates (34a, 34b). A planar bearing is formed between each of the planar bearing plates and each of the spherical bearing plates. A spherical bearing is formed between each of the spherical bearing plates and the spherical axial member. Thus, the supporting unit (U.alpha.) is provided with a certain degree of movability in five-axis directions. With the high degree of movability, the supporting unit (U.alpha.) can be easily connected to a base and a table.
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