System and method for inspecting a workpiece surface using polarization of scattered light
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United States of America Patent
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Nov 24, 2009
Grant Date -
Aug 31, 2006
app pub date -
Dec 17, 2005
filing date -
Dec 19, 2004
priority date (Note) -
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Abstract
A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. They system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.
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