Accelerometer
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United States of America Patent
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Nov 17, 2009
Grant Date -
Aug 23, 2007
app pub date -
Feb 14, 2007
filing date -
Feb 21, 2006
priority date (Note) -
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Abstract
An accelerometer is fabricated as a MEMS device and includes an array of capacitive electrode plates mechanically coupled to a common proof mass.The proof mass is constrained to move or vibrate in the plane parallel to the first array of plates. The capacitance between the first array of plates is measured with respect to additional arrays of capacitive plates inter-digitated in a comb like pattern.
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