Charged particle beam drawing apparatus
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United States of America Patent
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Oct 27, 2009
Grant Date -
Dec 29, 2005
app pub date -
May 25, 2005
filing date -
May 26, 2004
priority date (Note) -
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status (Latency Note)
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Abstract
In the present invention, vector data developing unit, ends separating unit, overlap removing unit and bitmapped data generating unit are sequentially connected in order to make pipeline processing. In addition, data of each raster is orderly arranged as a unit so that each processor can process data of each raster at a time. Each processor can make the pipeline processing to fast generate data. In addition, small-scale circuits can be used to realize the system because each raster can be processed as a unit of processing. Moreover, since data is orderly arranged before being processed, multi-valued bitmapped data can be generated in the order of drawing. Therefore, the drawing operation and data generating operation can be performed in parallel without use of any large-scale storage device.
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