Carbon electrode for generation of nitrogen trifluoride gas
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United States of America Patent
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Oct 27, 2009
Grant Date -
Aug 30, 2007
app pub date -
Aug 3, 2005
filing date -
Aug 5, 2004
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Abstract
A carbon electrode for producing gaseous nitrogen trifluoride comprising a dense texture with an average pore size of 0.5 μm or less is provided. The carbon electrode contains a carbonaceous material, and 3 to 10 wt % of at least one selected from magnesium fluoride and aluminum fluoride which have a melting point not lower than the baking temperature of the carbonaceous material.
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