System and method for inspecting a workpiece surface by analyzing scattered light in a front quartersphere region above the workpiece
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United States of America Patent
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Oct 20, 2009
Grant Date -
Feb 1, 2007
app pub date -
Dec 17, 2005
filing date -
Dec 19, 2004
priority date (Note) -
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Abstract
A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features, in the front quartersphere, a light channel assembly for collecting light reflected from the surface of the workpiece, and a front collector and wing collectors for collecting light scattered from the surface, to greatly improve the measurement capabilities of the system. The light channel assembly has a switchable edge exclusion mask and a reflected light detection system for improved detection of the reflected light.
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