On-chip reflectron and ion optics
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United States of America Patent
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Oct 20, 2009
Grant Date -
Apr 17, 2008
app pub date -
Oct 17, 2006
filing date -
Oct 17, 2006
priority date (Note) -
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Abstract
A microelectronics apparatus comprising a substrate, a pair of grid electrodes coupled to the substrate on opposing sides of a central axis, wherein the grid electrodes are substantially parallel to each other and extend substantially perpendicular from the substrate, and a plurality of ion reflection lenses each coupled to the substrate, wherein each ion reflection lens: (1) is substantially perpendicular to each of the grid electrodes; (2) extends substantially perpendicular from the substrate; and (3) has an aperture aligned with the central axis.
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