Equipment front end module
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United States of America Patent
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Oct 20, 2009
Grant Date -
N/A
app pub date -
Jun 27, 2005
filing date -
Jun 27, 2005
priority date (Note) -
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Abstract
Equipment front end module (EFEM) systems and methods for handling workpieces at EFEMs are disclosed. An equipment front end module (EFEM) system has an enclosure and a robot within the enclosure. The enclosure has two or more load ports, each being adapted to receive a front opening unified pod (FOUP). The robot is configured to move work pieces between the FOUP(s) and one or more work piece processing tools proximate the enclosure. The load ports are positioned relative to said robot such that said robot can move the work pieces between the tool and a FOUP at each load port with a simple R-theta motion or pure linear motion with respect to two axes.
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