High positioning reproducible low torque mirror-actuator interface

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7604359
APP PUB NO 20050248860A1
SERIAL NO

11115984

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Abstract

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The present high positioning reproducible mirror-actuator interface disclosed herein overcomes the deficiencies associated with conventional interface systems and offer a number of advantages that are disclosed herein. Generally, the mirror mounts provide a reliable and robust interface between the mirrors and actuators, that serve to move and position the mirrors, as wells as providing an interface between the mirrors and gravity compensator pins. The mirror mount is characterized as having a body that has an outer peripheral wall that includes a plurality of flexible elements around the perimeter of the body, each having a high stiffness in plane and a high flexibility out of plane. The body is open at the first end to allow flexing of the flexible elements. The flexible elements providing a direct coupling interface between the mirror mount and the mirror. The flexible elements of the mirror mount provides a number of advantages and increases the performance capabilities of the first mechanical interface between the mirror mount and the actuator.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS SMT AGRUDOLF-EBER-STRASSE 2 OBERKOCHEN 73447

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Broers, Sander C Eindhoven , NL 4 3
Soemers, Herman Mierlo , NL 5 17
van, Deuren Franciskus Hendrikus Valkenswaard , NL 4 3
Visser, Hendrik Dirk Eindhoven , NL 12 522

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