Fiber laser based production of laser drilled microvias for multi-layer drilling, dicing, trimming of milling applications
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United States of America Patent
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Oct 13, 2009
Grant Date -
Mar 30, 2006
app pub date -
Sep 28, 2005
filing date -
Sep 28, 2004
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Abstract
Fiber lasers and methods for constructing and using fiber lasers for micro-/nano-machining with output beams including stacked pulses and combinations of continuous wave, pseudo-continuous wave and pulse sequence components.
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