Surface inspection apparatus and surface inspection head apparatus
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United States of America Patent
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Oct 13, 2009
Grant Date -
Apr 3, 2008
app pub date -
May 15, 2007
filing date -
May 16, 2006
priority date (Note) -
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Abstract
A surface inspection apparatus has a detection unit that irradiates an inner circumferential surface of an inspection object with inspection light from a laser diode through a light projecting fiber, and detects the intensity of the reflected light of that inspection light. The detection unit comprises a first light receiving fiber group, which is disposed at the circumference of the light projecting fiber, a second light receiving fiber group, which is disposed further on the outer side thereof, and photodetectors, which are connected to each of the fiber groups.
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