Process to control semiconductor wafer yield

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United States of America Patent

PATENT NO 7602015
APP PUB NO 20070187754A1
SERIAL NO

11464619

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Abstract

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profile across the wafer and significantly reduced BV distribution over the wafer.

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Patent Owner(s)

Patent OwnerAddress
INTERNATIONAL RECTIFIER CORP233 KANSAS STREET EL SEGUNDO CA 90245

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Green, Simon Cardiff , GB 23 141

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