Illumination condenser for a particle optical projection system
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United States of America Patent
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Oct 13, 2009
Grant Date -
Feb 14, 2008
app pub date -
Mar 3, 2005
filing date -
Apr 23, 2004
priority date (Note) -
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Abstract
An illumination condenser for a particle optics projection system is disclosed. The illumination condenser is formed of a magnetic lens comprising a plurality of gaps. The magnetic lens is formed of a sequence of a plurality of partial lenses.
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