Systems and methods for a gas field ion microscope
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United States of America Patent
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Oct 13, 2009
Grant Date -
Sep 20, 2007
app pub date -
Mar 20, 2006
filing date -
Mar 20, 2006
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Abstract
In one aspect the invention provides a gas field ion microscope that includes an ion source in connection with an optical column, such that an ion beam generated at the ion source travels through the optical column and impinges on a sample. The ion source includes an emitter having a width that tapers to a tip comprising a few atoms. In other aspects, the invention provides methods for using the ion microscope to analyze samples and enhancing the performance of a gas field ion source.
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