Shape measurement method
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United States of America Patent
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Oct 6, 2009
Grant Date -
Jul 19, 2007
app pub date -
May 25, 2005
filing date -
May 28, 2004
priority date (Note) -
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Abstract
+Δf) are extracted. The phase difference between the two signal components is used for determining the distance and/or the change in distance. The method has a large unambiguousness range, making it possible to have a large depth measurement range, and can be used for workpieces having offset areas on the surface, wherein the measurement is not disturbed along the edges and the offset areas. The method also allows examining strongly inclined surfaces having a steep inclination such that that traditional methods based on evaluating interference lines cannot be used because of a high density of the interference lines.
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