Method of manufacturing vacuum plasma treated workpieces
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United States of America Patent
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Sep 29, 2009
Grant Date -
Mar 10, 2005
app pub date -
Jul 23, 2004
filing date -
Jul 30, 2003
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Abstract
A method of manufacturing vacuum plasma treated workpieces includes the steps of introducing at least one workpiece to be treated into a vacuum chamber; treating the workpiece in the vacuum chamber, thereby establishing a plasma discharge in the vacuum chamber by a supply signal with maximum energy at a first frequency which is at least in the Hf frequency range; removing the workpiece treated from the vacuum chamber; performing a cleaning inside the vacuum chamber, thereby establishing the plasma discharge by a supply signal with maximum energy at a second frequency higher than the Hf frequency; and repeating these steps at least one time.
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