Chemical liquid apparatus and deaerating method
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United States of America Patent
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Sep 29, 2009
Grant Date -
Aug 11, 2005
app pub date -
Dec 6, 2002
filing date -
Dec 27, 2001
priority date (Note) -
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Abstract
The amount of chemical liquids dispensed by a chemical liquid supply apparatus is stabilized and dispensing accuracy is remarkably improved. A pump discharges a liquid accommodated in a liquid tank. A filter is connected to the pump through a pump outlet flow path to which a pump discharge-side valve for opening/closing the flow path is provided. A dispensing nozzle (liquid dispense portion) is connected to the filter through a liquid discharge flow path to which a discharge valve for opening/closing the flow path is provided. A vacuum source communicates with the filter through an exhaust flow path to which a deaeration valve for opening/closing the flow path is provided.
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