Microscope with micro-mirrors for optional deflection and/or beam splitting
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United States of America Patent
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Sep 22, 2009
Grant Date -
Mar 5, 2009
app pub date -
Oct 8, 2008
filing date -
Aug 26, 2005
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Abstract
The present invention concerns a microscope with at least one optical element (21a, 21b) for optional deflection and/or splitting of a beam path passing through the microscope, wherein the at least one optical element (21a, 21b) is fashioned as a micro-mirror array (80) having a number of individually controllable and adjustable micro-mirrors (82).
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