Manufacturable micropositioning system employing sensor target
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United States of America Patent
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Sep 15, 2009
Grant Date -
Feb 14, 2008
app pub date -
Aug 3, 2007
filing date -
Sep 8, 2005
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Abstract
Embodiments of the present invention relate to systems and methods of position sensing that use a sensing target with a pattern of features thereupon, and to positioning modules and systems that position functional elements using such position sensing systems. A position sensing system includes an encoding module and a processing module. The encoding module has an active encoding region through which the sensing target is configured to move. Further, the encoding module is configured to generate a signal based on a portion of the sensing target within the active encoding region. The active encoding region has a dimension greater than the average critical dimension of the pattern of features. The processing module is configured to convert the signal generated into a position data based on an input range condition and an initial position condition.
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