Mold made of amorphous fluorine resin and fabrication method thereof
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United States of America Patent
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Sep 15, 2009
Grant Date -
Sep 13, 2007
app pub date -
May 4, 2004
filing date -
May 4, 2004
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Abstract
A mold for use in forming a target patterning on a substrate by using a pattern formed at one side of the mold is made of amorphous fluorine resin. The mold is fabricated through a compression molding technique by using a master mold (104) with a pattern structure thereon facing the pattern.
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