Wafer container with cushion sheets
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United States of America Patent
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Sep 15, 2009
Grant Date -
Feb 26, 2009
app pub date -
Jul 24, 2007
filing date -
Jul 25, 2006
priority date (Note) -
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Abstract
A wafer-retaining cushion sheet (5) has a wafer suction-adhering surface (5C) formed on a surface thereof, which adheres by suction to a semiconductor wafer (W). A wafer tray (1) is provided with a plurality of bottom openings (17) opening to the reverse side of the wafer-retaining cushion sheet (5), an air chamber (16) communicating with the bottom openings, and an air inlet (11) for supplying pressurized air into the air chamber (16) from the outside. Consequently, when pressurized air is supplied into the air chamber (16) through the air inlet (11) to increase the air pressure in the air chamber (16), the wafer-retaining cushion sheet (5) is elastically deformed into an inflated form at regions facing the bottom openings (17), thus causing separation between the semiconductor wafer (W) and at least a part of the wafer suction-adhering surface (5C) of the wafer-retaining cushion sheet (5).
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