Electron bombardment heating apparatus and temperature controlling apparatus
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United States of America Patent
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Sep 8, 2009
Grant Date -
Sep 28, 2006
app pub date -
Jun 1, 2006
filing date -
May 9, 2003
priority date (Note) -
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Abstract
An electron bombardment heating apparatus, in which thermions emitted from filaments are accelerated and impinge upon a heating plate, so as to heat the heating plate, wherein a peripheral wall of a heated material supporting member having a heating plate as a ceiling thereof is made of multi-staged peripheral wall portions, positioned vertically and having a different radius, and those peripheral wall portions are connected with each other by means of a ring-like horizontal wall. With this, thermal stress can be mitigated, which is caused due to a difference in temperature between the lower end portion of the heated material supporting member and the heating plate when heating up the heating plate, thereby causing no breakage in the heated material supporting member when conducting heating and cooling upon the heating plate, repetitively.
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