Inspection method and inspection apparatus
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United States of America Patent
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Sep 8, 2009
Grant Date -
Mar 29, 2007
app pub date -
Nov 29, 2006
filing date -
Nov 29, 2002
priority date (Note) -
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Abstract
The present invention provides an inspection apparatus and inspection method. The inspection apparatus includes a stage mechanism for supporting an object under inspection. A spatial filter is provided in the detection optical system to inspect the object. A printer is used to print the results of the spatial filter. The spatial filter can be provided in the form of a Fourier transformed image.
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