Cleaner for semiconductor devices

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United States of America Patent

PATENT NO 7579307
APP PUB NO 20070105735A1
SERIAL NO

10579141

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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to 5.0 mass % of hydrofluoric acid.

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Patent Owner(s)

Patent OwnerAddress
FINE POLYMERS CORPORATIONTOKYO 1038410

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kamon, Shigeru Noda , JP 2 8
Suga, Shigemasa Noda , JP 2 7
Terai, Akihiro Tokyo , JP 3 14
Yata, Takashi Osaka , JP 3 18

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