Method of manufacturing a microelectronic component utilizing a tool comprising an ESD dissipative ceramic

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United States of America Patent

PATENT NO 7579288
APP PUB NO 20060017046A1
SERIAL NO

11185918

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Ohm-cm), substantially pore free, high flexural strength, light colors, for desired ESD dissipation characteristics, structural reliability, high vision recognition, low wear and particulate contamination to be used as ESD dissipating tools, fixtures, load bearing elements, work surfaces, containers in manufacturing and assembling electrostatically sensitive microelectronic, electromagnetic, electro-optic components, devices and systems.

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Patent Owner(s)

  • COORSTEK, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kwon, Oh-Hun Westborough , US 33 408
Lin, Roger J Framingham , US 6 70
Simpson, Matthew A Sudbury , US 37 938

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