Patterns of conductive objects on a substrate coated with inorganic compounds and method of producing thereof
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United States of America Patent
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Aug 25, 2009
Grant Date -
Oct 4, 2007
app pub date -
Apr 2, 2007
filing date -
Apr 4, 2006
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Abstract
According to embodiments of the present invention, a method for manufacturing a pattern of conductive elements on a substrate is provided. The method includes depositing in a vacuum deposition chamber an electrically conductive material onto the substrate to form a base layer. Then, the method includes selectively applying an electric insulating agent on selective areas of the base layer. Then, areas of the base layer that are not covered with the insulating material are electroplated with a second electrically conductive layer. The electric insulating agent is then removed from the substrate and the base layer is chemically etched thus removing the base layer that was covered with the insulating material and selectively exposing the substrate to create the pattern of conductive objects on the substrate.
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