Coating formation by reactive deposition

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United States of America Patent

PATENT NO 7575784
SERIAL NO

09715935

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Abstract

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Light reactive deposition uses an intense light beam to form particles that are directly coated onto a substrate surface. In preferred embodiments, a coating apparatus comprising a noncircular reactant inlet, optical elements forming a light path, a first substrate, and a motor connected to the apparatus. The reactant inlet defines a reactant stream path. The light path intersects the reactant stream path at a reaction zone with a product stream path continuing from the reaction zone. The substrate intersects the product stream path. Also, operation of the motor moves the first substrate relative to the product stream. Various broad methods are described for using light driven chemical reactions to produce efficiently highly uniform coatings.

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Patent Owner(s)

Patent OwnerAddress
NANOGRAM CORPORATION49040 MILMONT DRIVE FREMONT CA 94538

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bi, Xiangxin San Ramon, US 67 1482
Chiruvolu, Shivkumar Sunnyvale, US 56 1135
Gardner, James T Cupertino, US 39 909
Kumar, Sujeet Newark, US 123 4141
Lim, Seung M Livermore, US 5 72
McGovern, William E LaFayette, US 20 581
Mosso, Ronald J Fremont, US 49 1136

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