Micromechanical mirrors with a high-reflection coating, method for production thereof and use thereof
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United States of America Patent
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Aug 11, 2009
Grant Date -
Mar 20, 2008
app pub date -
Jun 27, 2005
filing date -
Jun 25, 2004
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Abstract
The invention relates to micromechanical mirrors with a high-reflection coating for the deep-ultraviolet (DUV) and vacuum-ultraviolet (VUV) spectral range, based on a substrate which is coated with an aluminum layer and a transparent blooming coating. Likewise the invention relates to a method for the production of such micromechanical layers with a high-reflection coating and to the use thereof for the production of microsensors, optical data stores or video and data projection displays.
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