Positioning device
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United States of America Patent
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Aug 11, 2009
Grant Date -
Jun 8, 2006
app pub date -
Dec 7, 2005
filing date -
Dec 8, 2004
priority date (Note) -
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Abstract
The positioning device includes at least one displaceable carriage, liquid slide bearings on which the carriage is displaceable, and a carriage drive. The latter includes a first linear motor including a first primary part and a first secondary part that is opposite thereto and located in a first plane, and a second linear motor including a second primary part and a second secondary part that is opposite thereto and located in a second plane. The two linear motors are arranged in inclined positions such that the two planes are different and form an intersecting angle.
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