Pumping apparatus using thermal transpiration micropumps
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United States of America Patent
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Aug 11, 2009
Grant Date -
May 5, 2005
app pub date -
Nov 3, 2004
filing date -
Nov 4, 2003
priority date (Note) -
Expired
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Abstract
Pumping apparatus of the invention using thermal transpiration micropumps comprises a plurality of individual thermal transpiration micropumps distributed over a substrate (5) as a plurality of rows (A, B, C, . . . , D) each made up of a plurality of micropumps (1, 6, . . . , 7, 8, 9), thereby building up a plurality of columns (a, b, . . . , c, d). Respective heater elements (4) in each of the thermal transpiration micropumps are controlled by suitably controlling a row control conductor (10A) and a column control conductor (11a). This greatly simplifies multiplexed control of a large number of individual micropumps, thus enabling pumping capacity to be adapted.
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