Ion source
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United States of America Patent
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Aug 4, 2009
Grant Date -
Mar 20, 2008
app pub date -
Jul 20, 2007
filing date -
Feb 28, 2005
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Abstract
It is a technical challenge to provide a small-sized ion source excellent in operability.) is formed for extracting ions emitted from the anode electrode, and on which the insulation tube is mounted.
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