Method for purifying nitrogen trifluoride
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United States of America Patent
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Aug 4, 2009
Grant Date -
Jun 4, 2009
app pub date -
Aug 31, 2006
filing date -
Sep 7, 2005
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Abstract
A highly pure nitrogen trifluoride having a carbon tetrafluoride content of 10 ppm or less can be effectively obtained by boiling crude liquid nitrogen trifluoride having carbon tetrafluoride contaminant under a pressure ranging from 35 to 45 atm, to remove carbon tetrafluoride therefrom through vaporization.
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