Position control for scanning probe spectroscopy
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United States of America Patent
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Aug 4, 2009
Grant Date -
Dec 18, 2008
app pub date -
Jun 15, 2007
filing date -
Jun 15, 2007
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Abstract
A method of position control for scanning probe spectroscopy of a specimen. Probe positional error is determined by comparing images generated from a sequence of scans to identify differences between positions of at least a portion of a reference characteristic of the specimen in the images. A probe is moved to a target location for spectroscopic analysis, as a function of the determined probe positional error.
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