Bipolar electrostatic chuck
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United States of America Patent
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Jul 28, 2009
Grant Date -
Jul 20, 2006
app pub date -
Jun 15, 2004
filing date -
Jun 17, 2003
priority date (Note) -
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Abstract
A bipolar electrostatic including a chuck main body having a mounting surface; an annular electrode member formed in an annular configuration wit a center opening and fixed onto the mounting surface of the chuck main body though an adhesive layer; an inner electrode member disposed at a given clearance from the annular electrode member within the center opening of the annular electrode member and fixed onto the mounting surface through the adhesive layer; and an outer electrode member disposed at a given clearance from the annular electrode member outside of the annular electrode member and fixed onto the mounting surface through the adhesive layer.
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