Phase shifting interferometry with multiple accumulation
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United States of America Patent
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Jul 21, 2009
Grant Date -
Sep 6, 2007
app pub date -
Mar 1, 2007
filing date -
Mar 2, 2006
priority date (Note) -
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Abstract
An interferometer system is disclosed which is configured to combine measurement light with reference light to form an optical interference pattern, where the interferometer system includes a modulator configured to repetitively introduce a sequence of phase shifts between the measurement and reference light; and a camera system positioned to measure the optical interference pattern, where the camera system is configured to separately accumulate time-integrated images of the optical interference pattern corresponding to the different phase shifts in the sequence during the repetitions of the sequence.
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