Method and system for inspecting surfaces with improved light efficiency
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United States of America Patent
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Jul 21, 2009
Grant Date -
Sep 27, 2007
app pub date -
Jan 23, 2007
filing date -
Mar 22, 2006
priority date (Note) -
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Abstract
The radiation beam of discrete light source such as LEDs is shaped by a cylindrical lens and a spherical lens to form two perpendicular narrow lines to illuminate a surface. The first line is projected onto a sample surface to improve illumination efficiency, and the second line is projected onto a pupil plane of an imaging lens to improve illumination uniformity. The layout of the LED chip is optimized to match the aspect ratio of the imaging detector. Multiple LEDs at different wavelengths are combined to improve sensitivity. The full surface of the sample is inspected through the relative motion between the sample and the optics.
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