Vertically separated acoustic filters and resonators
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United States of America Patent
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Jul 21, 2009
Grant Date -
Jan 26, 2006
app pub date -
Aug 11, 2005
filing date -
Feb 23, 2004
priority date (Note) -
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Abstract
An apparatus including vertically separated acoustic resonators are disclosed. The apparatus includes a first acoustic resonator on a substrate and a second acoustic resonator vertically separated above the first acoustic resonator. Because the resonators are vertically separated above another, total area required to implement the resonators is reduced thereby savings in die size and cost are realized. The vertically separated resonators are supported by standoffs that are fabricated on the substrate, or on a resonator.
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