Method for calculating a model spectrum
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United States of America Patent
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Jul 14, 2009
Grant Date -
Jul 26, 2007
app pub date -
Jan 22, 2007
filing date -
Jan 25, 2006
priority date (Note) -
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Abstract
With technical surfaces, in particular in semiconductor manufacture, it is a regular requirement to determine the reflection coefficient. For this purpose, a model spectrum of an object of a plurality of wavelengths and a defined number of intermediate points is calculated. To increase the calculating speed, the defined number of intermediate points is calculated prior to the execution of the calculation.
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