System and method for controlling a beam source in a workpiece surface inspection system
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United States of America Patent
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Jul 7, 2009
Grant Date -
Nov 1, 2007
app pub date -
Dec 17, 2005
filing date -
Dec 19, 2004
priority date (Note) -
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Abstract
A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable scan speed beam scanning subsystem, preferably using an acousto-optic deflector, with beam compensation, so that variable scanning speeds can be achieved. Also included are methods and systems for improving the signal to noise ratio by use of scatter reducing complements, and a system and method for selectively and repeatedly scanning a region of interest on the surface in order to provide additional observations of the region of interest.
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