Scanning electron microscope
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United States of America Patent
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Jul 7, 2009
Grant Date -
Mar 27, 2008
app pub date -
Mar 13, 2007
filing date -
Mar 14, 2006
priority date (Note) -
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Abstract
A scanning electron microscope capable of securing a high ion detection efficiency in spite of a short working distance and the adaptability for high resolution is disclosed. An ion detector for detecting ions is arranged nearer to an electron source than a first pressure limiting aperture for maintaining the specimen chamber in a predetermined vacuum. This configuration makes it possible to achieve the high resolution of the semi-in-lens objective lens on one hand and to detect the ions generated by the collision between the secondary electrons and the gas molecules on the other hand.
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