Methods of forming pluralities of capacitors
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United States of America Patent
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Jul 7, 2009
Grant Date -
Sep 21, 2006
app pub date -
Mar 18, 2005
filing date -
Mar 18, 2005
priority date (Note) -
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Abstract
The invention includes methods of forming pluralities of capacitors. In one implementation, a method of forming a plurality of capacitors includes providing a plurality of capacitor electrodes within a capacitor array area over a substrate. The capacitor electrodes comprise outer lateral sidewalls. The plurality of capacitor electrodes is supported at least in part with a retaining structure which engages the outer lateral sidewalls. The retaining structure is formed at least in part by etching a layer of material which is not masked anywhere within the capacitor array area to form said retaining structure. The plurality of capacitor electrodes is incorporated into a plurality of capacitors. Other aspects and implementations are contemplated.
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