Counter balanced vertical docking motion in a driven vertical axis test head manipulator
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United States of America Patent
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Jun 30, 2009
Grant Date -
Mar 18, 2004
app pub date -
Mar 1, 2001
filing date -
Mar 1, 2000
priority date (Note) -
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status (Latency Note)
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Abstract
A positioner, such as a test head carrier for a semiconductor wafer and device tester, includes a vertical support and a main arm for supporting a test head. The main arm is suspended for vernier movement by use of a counterbalancing force such as counterweights. The suspension of the main arm is performed at a mechanical advantage so that reduced counter-blancing force and correspondingly large movements on the counterblance side are used to effect the vernier movement. The vertical support may be adjusted with a non-compliant drive such as a ball screw mechanism. The vernier movement can also be used to sense collisions and other positioning errors and actuation of the drive for the vertical support can be controlled accordingly.
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