Method for manufacturing a Liquid crystal display device
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United States of America Patent
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Jun 30, 2009
Grant Date -
Aug 24, 2006
app pub date -
Feb 9, 2006
filing date -
Feb 24, 2005
priority date (Note) -
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Abstract
The invention provides a novel technology where a TFT array substrate for a display device is formed with three photomasks. The invention is achieved by using the novel technology in combination with a well-known four-masks process. For the novel technology, during the lithography process where a photosensitive acrylic resin film is used to make contacts, taper patterns required for general through holes are formed simultaneously with a fine pattern formed in a light shielding area that is tapered more approximately to vertical, using a photomask with phase-shift effect. Thus the pixel electrode pattern can be separated without using lithography process in subsequent processes.
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