Magneto-optical device and manufacturing method thereof
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United States of America Patent
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Jun 23, 2009
Grant Date -
Sep 11, 2008
app pub date -
Feb 24, 2006
filing date -
Mar 16, 2005
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Abstract
A magneto-optical device is provided with a non-magnetic substrate, a magneto-optical crystal embedded in recessed portions formed in the surface of the non-magnetic substrate at positions where pixels are to be located, and a partitioning wall monolithic with the non-magnetic substrate and magnetically separating the magneto-optical crystal from each other at the position of a gap between the pixels, wherein the entire surface of the magneto-optical device is flattened. A method for manufacturing a magneto-optical device includes a digging down step, executed at positions where pixels are to be located, of digging down into the surface of a non-magnetic substrate in advance at the positions where the pixels are to be formed, so that a gap portion located between the pixels and around the dug areas remains to form a partitioning wall, a magnetic film forming step of forming a film made of a magneto-optical crystal over substantially the entire surface of the non-magnetic substrate, and a surface flattening step of performing flattening by removing a protruded portion formed by the magnetic film that has grown on the gap portion.
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