Displacement and flatness measurements by use of a laser with diffractive optic beam shaping and a multiple point sensor array using the back reflection of an illuminating laser beam
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United States of America Patent
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Jun 16, 2009
Grant Date -
May 4, 2006
app pub date -
Nov 22, 2005
filing date -
Oct 29, 2004
priority date (Note) -
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Abstract
A laser beam system for measuring an aspect of a surface wherein a laser beam is reshaped into a corrected shaped laser beam having a corrected energy profile and subsequently reshaped into a measurement shaped laser beam having an measurement energy profile shaped to be effected by the at least one aspect of the surface. The measurement shaped laser beam is reflected from the surface, being modified by the aspect of interest of the surface, and to a sensor array wherein the sensors measure the reflected laser beam to determine the aspect of interest of the surface.
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