Interferometric apparatus utilizing a cantilever array to measure a surface
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United States of America Patent
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Jun 9, 2009
Grant Date -
Oct 19, 2006
app pub date -
Jun 19, 2006
filing date -
Jun 19, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A cantilever array having a simple structure and being able to reliably detect a surface of a sample, a method for fabricating the same, a scanning probe microscope, a sliding apparatus of a guiding and rotating mechanism, a sensor, a homodyne laser interferometer, a laser Doppler interferometer having an optically exciting function for exciting a sample, each using the same, and a method for exciting cantilevers. The cantilever array includes a large number of compliant cantilevers sliding on a surface of a sample.
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