Glaucoma implant having MEMS flow module with flexing diaphragm for pressure regulation
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United States of America Patent
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Jun 9, 2009
Grant Date -
Jan 4, 2007
app pub date -
Jun 21, 2005
filing date -
Jun 21, 2005
priority date (Note) -
Expired
status (Latency Note)
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Abstract
One embodiment of a MEMS flow module (34) includes a first plate (36) and a second plate (48) that are separated by a first link (62). A plurality of concentrically disposed, annular flow-restricting walls (40) extend from the first plate (36), and each is separated from the second plate (48) by a flow-restricting gap (58). When the MEMS flow module (34) is exposed to a differential pressure and in one configuration, a perimeter (46) of the first plate (36) flexes away from the second plate (48) (and at least generally about where the first link (62) interfaces with the first plate (36)) to increase the size of one or more of the flow-restricting gaps (58), to in turn accommodate an increased flow or flow rate through the MEMS flow module (34).
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