Method for production of a device for thermal detection of radiation comprising an active microbolometer and a passive microbolometer
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jun 2, 2009
Grant Date -
Aug 23, 2007
app pub date -
Mar 4, 2005
filing date -
Mar 4, 2004
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The invention relates to a passive microbolometer (12), comprising a reflective screen (17) and a suspended membrane with the function of radiation absorber, thermometer and electrical connection. The membrane is supported by at least two anchor elements (15) fixed to a support substrate (16). The reflective screen (17) may be embodied by at least one layer (18) of metallic material with a thickness of the order of 500 .ANG. to 2000 .ANG.. The screen (17) is arranged beneath the membrane in electrical contact with the membrane absorber element (13) such as to reduce the area resistance of the unit made up of the screen (17) and the absorbing element (13) and to avoid the absorption of radiation by the latter.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully