Filters employing both acidic polymers and physical-adsorption media
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United States of America Patent
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Jun 2, 2009
Grant Date -
Aug 3, 2006
app pub date -
Feb 28, 2006
filing date -
May 5, 2000
priority date (Note) -
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Abstract
A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalchols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.
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