Monolithic nanoscale actuation
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United States of America Patent
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May 26, 2009
Grant Date -
Dec 6, 2007
app pub date -
Jun 5, 2006
filing date -
Jun 5, 2006
priority date (Note) -
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Abstract
An apparatus including an actuator configured for controllable deflection, and also including a piezoresistive element integral to the actuator and having first and second piezoresistive portions and a plurality of contacts. One of the plurality of contacts is configured to pass a received feedback signal through the first and second piezoresistive portions. Detection of the actuator deflection is indicated by comparison of the feedback signal as detected via at least one of the plurality of contacts that are interposed by at least one of the first and second piezoresistive portions.
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